Glancing angle deposition: Fabrication, properties, and applications of micro- and nanostructured thin films
By M. M. Hawkeye, Michael J. Brett. 2007
851 citations recorded by the source corpus.
Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering, Surfaces, Coatings and Films
View Paper: https://www.semanticscholar.org/paper/a2d5af6e4f18aa0640f66f70e06af158e2c4987c
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In Atomic and Molecular Physics, and Optics
In Electrical and Electronic Engineering
In Surfaces, Coatings and Films
Citations in the corpus
- Perspectives on oblique angle deposition of thin films: From fundamentals to devices (2016, methodology): “[16,17], who along with other authors [63–92], have systematically employed different substrate movements to tailor the morphology of sculptured thin films.”