Micromachined Thermal Flow Sensors - A Review
By J. Kuo, Lawrence Yu, Ellis Meng. Micromachines, 2012
440 citations recorded by the source corpus.
Microfabrication has greatly matured and proliferated in use amongst many disciplines. There has been great interest in micromachined flow sensors due to the benefits of miniaturization: low cost, small device footprint, low power consumption, greater sensitivity, integration with on-chip circuitry, etc. This paper reviews the theory of thermal flow sensing and the different configurations and operation modes available. Material properties relevant to micromachined thermal flow sensing and selection criteria are also presented. Finally, recent applications of micromachined thermal flow sensors are presented. Detailed tables of the reviewed devices are included.
Subfields: Biomedical Engineering, Computer Networks and Communications, Electrical and Electronic Engineering
View Paper: https://www.semanticscholar.org/paper/a1ffdfc2af07a9a67afea39d80c873237c41db62
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In Biomedical Engineering
In Electrical and Electronic Engineering
Citations in the corpus
- Design and applications of MEMS flow sensors: A review (2019, background): “There have been several efforts reported in the ast to improve the performance of flow sensors by combing two ensing principles such as calorimetric principle to hot-wire or hotlm to enable both increase of the sensitivity at low frequency and xtension of measured flow range; thereby enabling higher”
- Thermoresistive Effect for Advanced Thermal Sensors: Fundamentals, Design Considerations, and Applications (2017, background): “and diffusivity of the fluid [4], [5].”