Kinetic pathway of the ferroelectric phase formation in doped HfO2 films

By L. Xu, T. Nishimura, S. Shibayama, T. Yajima, S. Migita, A. Toriumi. 2017

193 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/a12596240083015fe2f814c3ce85884ad817e44e