Surface-plasmon-assisted nanoscale photolithography by polarized light
By D. Shao, Shaochen Chen. 2005
152 citations recorded by the source corpus.
Subfields: Biomedical Engineering, Surfaces, Coatings and Films
View Paper: https://www.semanticscholar.org/paper/a0ddd63b99608eb71cb1345fb4f14e23442fdaef
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In Biomedical Engineering
In Surfaces, Coatings and Films
Citations in the corpus
- Review on Micro- and Nanolithography Techniques and Their Applications (2012, background): “This opens up a broad range of possibilities and applications from nanolithography [134-137] and imaging [138-141] to chemical sensing [142-144] and biophysics [145,146].”