Vibration Energy Harvesting with PZT Micro Device

By Paul Muralt, Marcin Marzencki, B. Belgacem, F. Calame, Skandar Basrour. 2009

157 citations recorded by the source corpus.

A micro power generator harvesting vibration energy by resonant inertial oscillation of a piezoelectric laminated cantilever with proof mass was designed, fabricated, and characterized. The active part with 2 pm thick PZT on 5 mu m silicon was equipped with interdigitated electrodes to achieve higher voltages. A coupling constant k(2)=5% was derived from the difference in resonance frequencies at low and high impedance. At optimal load impedance, a voltage of 1.6 V and an output power of 1.4 mu W was measured with a 0.8x1.2 mm cantilever having an active area of 0.8x0.4 mm, excited with 2g at 870 Hz.

Subfields: Biomedical Engineering, Electrical and Electronic Engineering, Mechanical Engineering

View Paper: https://www.semanticscholar.org/paper/a0dbced8a166eb22b4dd0eb11adac4549b674d62

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In Biomedical Engineering

1. Hassan Elahi
2. Othman Sidek
3. Salem Saadon
4. P. Gaudenzi
5. M. Eugeni

In Electrical and Electronic Engineering

1. Hassan Elahi
2. Othman Sidek
3. Salem Saadon
4. P. Gaudenzi
5. M. Eugeni

In Mechanical Engineering

1. Hassan Elahi
2. Othman Sidek
3. Salem Saadon
4. P. Gaudenzi
5. M. Eugeni

Citations in the corpus

• Chemical Solution Deposition of Functional Oxide Thin Films (2013, unknown): “detergent [99, 100] acetone [45, 100–103], trichloroethylene [45, 101], alcohol [45, 100–102, 104, 105], sometimes followed by a heat treatment [45].”
• A Review on Piezoelectric Energy Harvesting: Materials, Methods, and Circuits (2017, unknown): “…al. 2010; Isarakorn et al. 2011; Jeon et al. 2005; Lee et al. 2009; Lei et al. 2011; Marzencki et al. 2007; Massaro et al. 2011; Miller et al. 2011; Muralt et al. 2009a; Park, Park, and Lee 2010; Roundy, Wright, and Rabaey 2003a, 2003b; Shen et al. 2008; Van Schaijk et al. 2008; Xu et al. 2012b;…”
• A review of vibration-based MEMS piezoelectric energy harvesters (2011, background): “Similar works on the modeling, design and fabrication of MEMS-based piezoelectric power harvesters is being referred in the literature survey [13–23].”
• A Review on Mechanisms for Piezoelectric-Based Energy Harvesters (2018, background): “of their flexibility, low electromagnetic interference, high positioning, and high torque-to-volume ratio [75,76].”