A capacitive humidity sensor integrated with micro heater and ring oscillator circuit fabricated by CMOS–MEMS technique

By C. Dai. 2007

158 citations recorded by the source corpus.

Subfields: Bioengineering, Biomedical Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/a02d75c86e03327a98fa85e8f875f6d81a9318a4