Effectiveness of anisotropic etching of silicon in aqueous alkaline solutions

By Priyanka Singh, Ravi Kumar, M. Lal, Sultan Singh, B. K. Das. 2001

207 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/9fc76513af1da49b098fcf4785f132c3d71c65ff

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In Electrical and Electronic Engineering

  1. K. R. McIntosh

In Materials Chemistry

  1. K. R. McIntosh

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