Plasma‐Resistant Dense Yttrium Oxide Film Prepared by Aerosol Deposition Process

By J. Iwasawa, Ryoichi Nishimizu, Masahiro Tokita, M. Kiyohara, K. Uematsu. 2007

148 citations recorded by the source corpus.

Subfields: Aerospace Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/9f67d9d865edcfcb4c8395ad7ea8f5c19874f0ab