Self-assembling MEMS variable and fixed RF inductors

By Victor M. Lubecke, B. Barber, E. Chan, D. López, P. Gammel. 2000 Asia-Pacific Microwave Conference. Proceedings (Cat. No.00TH8522), 2000

140 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/9f58c0d916d1cb48895afdfe6286b859cffd4227

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In Biomedical Engineering

1. I. Bahl

In Electrical and Electronic Engineering

1. I. Bahl

Citations in the corpus

• On the design of RF spiral inductors on silicon (2003, background): “Near elimination of the substrate losses can be accomplished by local removal of the silicon [41]–[47] or by using high-aspect-ratio and surface micromachining techniques [48]–[51].”