Atomic force microscope local oxidation nanolithography of graphene

By L. Weng, Liyuan Zhang, Yong P. Chen, Leonid P. Rokhinson. 2008

205 citations recorded by the source corpus.

We demonstrate the local oxidation nanopatterning of graphene films by an atomic force microscope. The technique provides a method to form insulating trenches in graphene flakes and to fabricate nanodevices with sub-nanometer precision. We demonstrate fabrication of a 25-nm-wide nanoribbon and submicron size nanoring from a graphene flake. We also found that we can write either trenches or bumps on the graphene surface depending on the lithography conditions. We attribute the bumps to partial oxidation of the surface and incorporation of oxygen into the graphene lattice.

Subfields: Electrical and Electronic Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/9e6346d054a566159a8eaa4b6daeb199b15567f2

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The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Electrical and Electronic Engineering

1. Zhaoping Liu
2. A. Mahmood
3. C. Soldano
4. Xufeng Zhou
5. E. Dujardin

In Materials Chemistry

1. A. Mahmood
2. C. Soldano
3. E. Dujardin
4. L. Zou
5. Yasodinee Wimalasiri

Citations in the corpus

• Mechanism of nonvolatile resistive switching in graphene oxide thin films (2011, background): “[45] Weng LS, Zhang LY, Chen YP, Rokhinson LP.”
• Production, properties and potential of graphene (2010, methodology): “[233] Weng LS, Zhang LY, Chen YP, Rokhinson LP.”