Defect reduction of selective Ge epitaxy in trenches on Si(001) substrates using aspect ratio trapping

By Ji-Soo Park, J. Bai, M. Curtin, B. Adekore, M. Carroll, Anthony Lochtefeld. 2007

170 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/9dd33aee6cc5853f183362802ef5dc5ef492b672