Annealing of Al2O3 thin films prepared by atomic layer deposition

By L. Zhang, H. C. Jiang, C. Liu, J. Dong, P. Chow. 2007

167 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Electronic, Optical and Magnetic Materials, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/9cfb4fecbad113e88369cad57bf293a68fc3da9b