Independent control of ion current and ion impact energy onto electrodes in dual frequency plasma devices

By P. Boyle, A. Ellingboe, M. Turner. 2004

214 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/9c86340925224b23c91682089c81c8f55b615ff6