The distribution of ion energies at the substrate in an asymmetric bi-polar pulsed DC magnetron discharge

By J. Bradley, H. Bäcker, Y. Aranda-Gonzalvo, P. Kelly, R. Arnell. 2002

144 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Materials Chemistry, Mechanics of Materials

View Paper: https://www.semanticscholar.org/paper/9c730141c80e4e1a8be02fa9493d537a68d8c7db