Germanium surface passivation and atomic layer deposition of high-k dielectrics—a tutorial review on Ge-based MOS capacitors

By Qi Xie, Shao-Ren Deng, M. Schaekers, D. Lin, M. Caymax, A. Delabie, X. Qu, Yulong Jiang, D. Deduytsche, C. Detavernier. 2012

155 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/9c5a661d391c43da928a27c4f28a750ee32c35a5