Monolithically integrated micromachined RF MEMS capacitive switches

By J. Park, Geun-ho Kim, K. Chung, J. Bu. 2001

147 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/9b35861b70233f785ca5fdbd57ddcbcb6bd0f2ff

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Atomic and Molecular Physics, and Optics

1. Ghader Rezazadeh
2. Hamed Sadeghian
3. Peter M. Osterberg
4. Vijay K. Varadan

In Biomedical Engineering

1. Ghader Rezazadeh
2. Hamed Sadeghian
3. Peter M. Osterberg
4. Vijay K. Varadan

In Electrical and Electronic Engineering

1. Ghader Rezazadeh
2. Hamed Sadeghian
3. Peter M. Osterberg
4. K. Vinoy
5. Vijay K. Varadan
6. Yuriy V. Pershin
7. M. Di Ventra

Citations in the corpus

• RF MEMS and Their Applications (2002, background): “, 1999), capacitive (Brown, 1998; Goldsmith et al., 1998; Majumdar et al., 1997; Muldavin and Rebeiz, 2000a, 2000b; Pacheco, Katehi and Nguyen, 2000; Pacheco, Peroulis and Katehi, 2001; Park et al., 2001; Poltz et al., 2001; Rizk et al., 2001; Santos et al., 1997; Sovero et al., 1999; Ulm et al., 20”
• Application of the Generalized Differential Quadrature Method to the Study of Pull-In Phenomena of MEMS Switches (2007, methodology): “A brief fabrication sequence for the fixed‐fixed beam MEMS switches that is shown in Fig. 1(a) is described in [ 19 ].”