Metal Ion Implantation for the Fabrication of Stretchable Electrodes on Elastomers

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Flexible and stretchable electrodes for dielectric elastomer actuators (2012, background): “Gold and palladium implanted electrodes also presents partial transparency with values between 35 % and 70 % for a single electrode, depending on the metal and the implanted dose [70].”
Stretchable gold conductors embedded in PDMS and patterned by photolithography: fabrication and electromechanical characterization (2010, background): “A lithography process enabling reliable pattern transfer down to 30 μm onto the PDMS membrane offers a promising alternative for patterning thin films on ultra-compliant substrates and further opportunities for soft electrodes and interconnects for polymeric MEMS and stretchable circuitry.”
Fabrication methods and applications of microstructured gallium based liquid metal alloys (2016, background): “Among them, micro-sized helical wires [25], horseshoe like forms of gold [26] or copper [27], laser ablated copper foil in silicone [28], gold micro-wires with tortuosity [29], copper film by electroless deposition [30], meander-shaped nickel-gold layer in PDMS [31], and metal ion implanted elastome”