Differential pressure sensor using a piezoresistive cantilever

By Hidetoshi Takahashi, N. Dung, Kiyoshi Matsumoto, I. Shimoyama. 2012

138 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/97e4dbdcd60faebeb1a0d91f2ed6870d183fdb35