Mechanisms, models and methods of vapor deposition
By H. Wadley, Xiaowang W. Zhou, R. Johnson, M. Neurock. 2001
239 citations recorded by the source corpus.
Subfields: Atmospheric Science, Atomic and Molecular Physics, and Optics
View Paper: https://www.semanticscholar.org/paper/97afbfe5d676912f844cb22b85edc8a382c94885
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In Atmospheric Science
In Atomic and Molecular Physics, and Optics
Citations in the corpus
- Perspectives on oblique angle deposition of thin films: From fundamentals to devices (2016, background): “In this regard, numerous works and review papers have already dealt with both, the phenomenology and key theoretical issues involved in the OAD of thin films by different deposition techniques [10,11,14,264].”
- An overview of spatial microscopic and accelerated kinetic Monte Carlo methods (2007, methodology): “This key input to any KMC simulation can be extracted from smaller length and time scale simulation tools, such as density functional theory (DFT) [18,99–102] (these are often termed first principles KMC simulations), transition state identification methods, transition state theory (TST) [103,104], ”