Formation of TiO2 and ZrO2 Nanotubes Using Atomic Layer Deposition with Ultraprecise Control of the Wall Thickness

By H. Shin, D. Jeong, Jaegab Lee, M. Sung, Jiyoung Kim. 2004

243 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/97acd03799f9b5e70503cbce0d738df159ebe2fc