Femtosecond laser aperturless near-field nanomachining of metals assisted by scanning probe microscopy
By A. Chimmalgi, T. Choi, Costas P. Grigoropoulos, K. Komvopoulos. 2003
176 citations recorded by the source corpus.
Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Electrical and Electronic Engineering
View Paper: https://www.semanticscholar.org/paper/96e885288ca4d45185b74d84fb1a0de8e2a54308
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In Atomic and Molecular Physics, and Optics
In Biomedical Engineering
In Electrical and Electronic Engineering
Citations in the corpus
- Femtosecond laser micromachining in transparent materials (2008, background): “In less than ten years the resolution of surface ablation has improved to enable nanometre-scale precisio”
- Fabrication of Micro/Nano Structures on Metals by Femtosecond Laser Micromachining (2014, background): “Thus, nanometer resolution and precision are possible [38,39].”
- Ultrafast Laser Applications in Manufacturing Processes: A State-of-the-Art Review (2019, unknown): “By applying femtosecond laser beams in optical near fi elds, such as scanning probe microscopy [96], near-fi eld scanning optical microscopy [97], plasmonic nanolitho-graphy [98 – 100], microlens array nanolithography [101,102], and interference lithography [98,103], nano-features of tens of…”
- Hybrid manufacturing in micro/nano scale: A Review (2014, background): “23.(71) Using this system, a high spatial resolution of approximately 10 nm was achieved, which, at that time, was not possible using standard nano machining techniques.”