Process and material properties of polydimethylsiloxane (PDMS) for Optical MEMS

By F. Schneider, J. Draheim, R. Kamberger, U. Wallrabe. 2009

452 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/96da7b56ffc072d03bdb487392f5dcdbe054079e

Citations in the corpus

• Extended PDMS stiffness range for flexible systems (2015, unknown): “Much work has been done into the investigation of the mechanical properties of PDMS and their potential tunability [24, 26, 21, 27, 28, 16, 29, 30, 17, 31, 4, 32, 33, 34, 35].”