Femtosecond laser three-dimensional micro- and nanofabrication
By Koji Sugioka, Ya Cheng. 2014
429 citations recorded by the source corpus.
The rapid development of the femtosecond laser has revolutionized materials processing due to its unique characteristics of ultrashort pulse width and extremely high peak intensity. The short pulse width suppresses the formation of a heat-affected zone, which is vital for ultrahigh precision fabrication, whereas the high peak intensity allows nonlinear interactions such as multiphoton absorption and tunneling ionization to be induced in transparent materials, which provides versatility in terms of the materials that can be processed. More interestingly, irradiation with tightly focused femtosecond laser pulses inside transparent materials makes three-dimensional (3D) micro- and nanofabrication available due to efficient confinement of the nonlinear interactions within the focal volume. Additive manufacturing (stereolithography) based on multiphoton absorption (two-photon polymerization) enables the fabrication of 3D polymer micro- and nanostructures for photonic devices, micro- and nanomachines, and micro...
Subfields: Biomedical Engineering, Computational Mechanics, Ophthalmology
View Paper: https://www.semanticscholar.org/paper/967cc7bf917667de2e516843a84349c4b85e6424
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In Biomedical Engineering
In Computational Mechanics
In Ophthalmology
Citations in the corpus
- Three-dimensional femtosecond laser processing for lab-on-a-chip applications (2018, background): “Alternative hybrid subtractive and additive 3D-FLP is known as ship-in-a-bottle integration, in which subtractive FLAE of glass is followed by additive TPP of negative photoresists in order to fabricate hybrid inorganic-organic LOC devices with polymeric 3D microstructures possessing specific functi”