Non-destructive characterisation of porous low-k dielectric films

By M. Baklanov, K. Mogilnikov. 2002

144 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Electronic, Optical and Magnetic Materials, Mechanics of Materials

View Paper: https://www.semanticscholar.org/paper/95052c0ce298e3c58cd7e3669645b1e8905938dc