Atomic layer deposition on particles using a fluidized bed reactor with in situ mass spectrometry

By D. King, J. Spencer, Xinhua Liang, L. Hakim, A. Weimer. 2007

187 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/940fcd75d2118116a4dac4770a1026db69b67dca

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Electrical and Electronic Engineering

1. R. Pitz‐Paal

Citations in the corpus

• Materials-Related Aspects of Thermochemical Water and Carbon Dioxide Splitting: A Review (2012, background): “Atomic layer deposition is used to form nano-scale films on particles of various substrates [78].”