Pyrolysis of Negative Photoresists to Fabricate Carbon Structures for Microelectromechanical Systems and Electrochemical Applications

By A. Singh, J. Jayaram, M. Madou, Sheikh A. Akbar. 2002

143 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/93835ef055aacb6710ecd7937a121f91694d7c6c