Rayleigh scattering, mode coupling, and optical loss in silicon microdisks

By M. Borselli, Kartik Srinivasan, P. Barclay, Oskar J. Painter. 2004

172 citations recorded by the source corpus.

High refractive index contrast optical microdisk resonators fabricated from silicon-on-insulator wafers are studied using an external silica fiber taper waveguide as a wafer-scale optical probe. Measurements performed in the 1500 nm wavelength band show that these silicon microdisks can support whispering-gallery modes with quality factors as high as 5.2×10^5, limited by Rayleigh scattering from fabrication induced surface roughness. Microdisks with radii as small as 2.5 µm are studied, with measured quality factors as high as 4.7×10^5 for an optical mode volume of 5.3 (lambda/n)^3.

Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/934dc9c72415ea6f84c8b1ce0fb4217cc4ba43e9

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In Atomic and Molecular Physics, and Optics

1. Andrey Matsko
2. Vladimir Ilchenko
3. Yanne K. Chembo

In Electrical and Electronic Engineering

1. Andrey Matsko
2. Vladimir Ilchenko
3. Yanne K. Chembo

Citations in the corpus

• Optical resonators with whispering-gallery modes-part II: applications (2006, methodology): “scattering on Q-factors of high refractive index contrast WGRs fabricated from silicon-on-insulator wafers was studied using an external silica fiber taper waveguide [223], [224].”