Recent developments in micromilling using focused ion beam technology

By Ampere A. Tseng. 2004

413 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/916f29ec653ce43af9826c4253a6644eafc8d996

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Atomic and Molecular Physics, and Optics

1. Werayut Srituravanich
2. Alongkorn Pimpin
3. Khadijah A Altammar

In Biomedical Engineering

1. Werayut Srituravanich
2. Alongkorn Pimpin
3. Khadijah A Altammar

In Electrical and Electronic Engineering

1. Werayut Srituravanich
2. Alongkorn Pimpin

Citations in the corpus

• Surface Texture Manufacturing Techniques and Tribological Effect of Surface Texturing on Cutting Tool Performance: A Review (2016, neutral): “FIB milling is the process of transferring patterns by direct impingement of the ion beam on the substrate material.(128) FIB can be used for local extraction or deposition with a resolution of 100 nm.”
• Review on Micro- and Nanolithography Techniques and Their Applications (2012, background): “On the other hand, maskless lithography, such as electron beam lithography [22-29], focused ion beam lithography [30-33], and scanning probe lithography [34-44], fabricates arbitrary patterns by a serial writing without the use of masks.”