Dielectric property and thermal stability of HfO2 on silicon

By Yen‐Ting Lin, R. Puthenkovilakam, Jane P. Chang. 2002

228 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/9134e8c5d3c55a653b6d4861f3379e5af4ee02f9