ZnO/Al2O3 nanolaminates fabricated by atomic layer deposition: growth and surface roughness measurements

By Jeffrey W. Elam, Z. A. Sechrist, S. George. 2002

238 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Electronic, Optical and Magnetic Materials, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/90dbb581718c0f87a0a69f71c9d84499f7fcb650