Thin-film piezoelectric MEMS

By C. Eom, Susan E. Trolier-McKinstry. MRS bulletin, 2012

285 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Electrical and Electronic Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/90db3e179dc86b367535593803983a70a8757de9

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Biomedical Engineering

1. Il-Kwon Oh
2. Jungho Ryu
3. Asif Khan
4. Heung Soo Kim
5. Zafar Abas

In Electrical and Electronic Engineering

1. Il-Kwon Oh
2. Jungho Ryu
3. Asif Khan
4. Heung Soo Kim
5. Zafar Abas

In Materials Chemistry

1. Il-Kwon Oh
2. Jungho Ryu
3. Asif Khan
4. Heung Soo Kim
5. Zafar Abas

Citations in the corpus

• Piezoelectric thin films: an integrated review of transducers and energy harvesting (2016, background): “Another possibility is to allow nanoelectromechanical (NEMS) systems to be self-powered, analogous to the aim of piezoelectric energy harvesting for larger scale systems.”
• Review of piezoelectric micromachined ultrasonic transducers and their applications (2017, background): “Thin-film piezoelectric MEMS devices are used in microsensors/actuators and RF MEMS applications as they can provide lower power consumption, greater energy density, smaller size, and linearity in comparison to electrostatic MEMS devices [6].”