Generally Applicable Self-Masked Dry Etching Technique for Nanotip Array Fabrication

By Chih-Hsun Hsu, H. Lo, Chia-Fu Chen, C. Wu, Jenn-Shyong Hwang, Debajyoti Das, J. Tsai, Li‐Chyong Chen, Kuei-Hsien Chen. 2004

147 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Condensed Matter Physics, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/90bcb38e67c13efd59122a45da33834bcc29b04e

Citations in the corpus