Parylene micro membrane capacitive sensor array for chemical and biological sensing

By Srinath Satyanarayana, D. McCormick, Arun Majumdar. 2006

107 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Bioengineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/90abcfecee1df3853d96b22e74c88bbdf4ee8a8e