Magnetron sputtered epitaxial single-phase Ti3SiC2 thin films

By J. Palmquist, Ulf Jansson, T. Seppänen, P. Persson, J. Birch, L. Hultman, P. Isberg. 2002

168 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/8fdf61764a14104e5e822f289fd15a31eca14079