Femtosecond laser-assisted three-dimensional microfabrication in silica.

By A. Marcinkevičius, Saulius Juodkazis, M. Watanabe, M. Miwa, S. Matsuo, Hiroaki Misawa, J. Nishii. Optics Letters, 2001

677 citations recorded by the source corpus.

We demonstrate direct three-dimensional (3-D) microfabrication inside a volume of silica glass. The whole fabrication process was carried out in two steps:(i) writing of the preprogrammed 3-D pattern inside silica glass by focused femtosecond (fs) laser pulses and (ii) etching of the written structure in a 5% aqueous solution of HF acid. This technique allows fabrication of 3-D channels as small as 10mum in diameter inside the volume with any angle of interconnection and a high aspect ratio (10mum -diameter channels in a 100mum -thick silica slab).

Subfields: Biomedical Engineering, Computational Mechanics

View Paper: https://www.semanticscholar.org/paper/8f04c5326ed3e164be3b6b73dc977f157d748abf

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Biomedical Engineering

1. P. Ormos
2. E. Mazur
3. Koji Sugioka
4. Roberto Osellame
5. Yung C. Shin
6. Rafael R. Gattass
7. Rebeca Martinez Vazquez
8. Lóránd Kelemen

In Computational Mechanics

1. Roberto Osellame
2. Koji Sugioka
3. Rafael R. Gattass
4. E. Mazur
5. Yung C. Shin

Citations in the corpus

• Femtosecond laser micromachining in transparent materials (2008, background): “Although HF etches silica too, the laser-exposed material reacts more readily with HF than unexposed area”
• Ultrafast Laser Applications in Manufacturing Processes: A State-of-the-Art Review (2019, positive): “The same technique without heat treatment was used to create microchannels with a high aspect ratio (50:1) [79 – 82].”