Stability of thin platinum films implemented in high-temperature microdevices

By R. Tiggelaar, R. Sanders, A. Groenland, J. Gardeniers. 2009

210 citations recorded by the source corpus.

Subfields: Computational Mechanics, Electrical and Electronic Engineering, Mechanics of Materials

View Paper: https://www.semanticscholar.org/paper/8eb4fc38f8242a3db5ecf0bf9abbcf10ff8de07e