Electrical and reliability characteristics of ZrO2 deposited directly on Si for gate dielectric application

By W. Qi, R. Nieh, Byoung-Hun Lee, L. Kang, Y. Jeon, Jack C. Lee. 2000

172 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/8dda0a9753128d4bb3199b86db72b37b465f484d