Three-dimensional imaging of individual hafnium atoms inside a semiconductor device

By K. Benthem, A. Lupini, Miyoung Kim, H. Baik, S. Doh, Jong-Ho Lee, M. Oxley, S. Findlay, L. Allen, J. T. Luck and 1 more. 2005

204 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Structural Biology, Surfaces, Coatings and Films

View Paper: https://www.semanticscholar.org/paper/8d539d3da2212626c1dd3decfb61d899ecd5528a