Fabrication of Ultrathin Single‐Crystal Diamond Membranes

By B. A. Fairchild, P. Olivero, S. Rubanov, A. Greentree, F. Waldermann, R. A. Taylor, Ian A. Walmsley, Jason M. Smith, S. Huntington, B. Gibson and 2 more. 2008

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A method for preparing ultrathin single-crystal diamond membranes suitable for post-processing and liftout, is reported. The proposed method used single-crystal diamond substrates and two-energy ion implant process for the fabrication of thin diamond membranes. Two ion-implant process was used in this method to prepare two different damage layers within diamond sample. This method can be used for preparing integrated quantum-photonic structure based on color center in diamond. This method can also be used for fabricating various structures including Bragg gratings and whispering gallery mode resonators. A significant application of the diamond nanostructures is to fabricate the micro- and nanoscale cantilevers. It was also observed that the fabricated single-crystal diamond are suitable for another FIB processing.

Subfields: Electrical and Electronic Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/8d40bdb45d5d28ecbb852f39cb842c81f3b08362