Dependence of impurity incorporation on the polar direction of GaN film growth

By Masatomo Sumiya, K. Yoshimura, K. Ohtsuka, S. Fuke. 2000

154 citations recorded by the source corpus.

Subfields: Computational Mechanics, Condensed Matter Physics, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/8cfd3c3b14f443eb96aa82ae73319d86fcd794d6