Growth of Ti3SiC2 thin films by elemental target magnetron sputtering

By J. Emmerlich, H. Högberg, S. Sasvári, P. Persson, L. Hultman, J. Palmquist, Ulf Jansson, Jon Molina-Aldareguia, Z. Czigány. 2004

173 citations recorded by the source corpus.

Subfields: Ceramics and Composites, Materials Chemistry, Mechanical Engineering

View Paper: https://www.semanticscholar.org/paper/8ce30734ae340fa53ca53aa22abb4ccb1e591ceb