Comparative study on emission characteristics of extreme ultraviolet radiation from CO2 and Nd:YAG laser-produced tin plasmas

By Hiroki Tanaka, A. Matsumoto, K. Akinaga, A. Takahashi, T. Okada. 2005

147 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering, Mechanics of Materials

View Paper: https://www.semanticscholar.org/paper/8cdb6769337cbcc2beeb32e00293109f72f2515f