Development of a Low‐Dielectric‐Constant Polymer for the Fabrication of Integrated Circuit Interconnect

By S. J. Martin, J. Godschalx, M. E. Mills, E. Shaffer, P. Townsend. 2000

296 citations recorded by the source corpus.

Subfields: Electronic, Optical and Magnetic Materials, Materials Chemistry, Polymers and Plastics

View Paper: https://www.semanticscholar.org/paper/8bd618c9fe7d428464005c2520678334b2f03635