Silicon-on-Insulator microring resonator for sensitive and label-free biosensing.

By K. De Vos, I. Bartolozzi, E. Schacht, Peter Bienstman, R. Baets. Optics Express, 2007

810 citations recorded by the source corpus.

Label-free biosensors attempt to overcome the stability and reliability problems of biosensors relying on the detection of labeled molecules. We propose a label-free biosensor based on microring cavities in Silicon-on-Insulator (SOI) that fits in an area below 10x10mum(2). The resonance wavelength shift that occurs when the surroundings of a cavity is changed, is used for sensing. While theoretically the performance for bulk refractive index changes is moderate (10(-5)), this device performs outstanding in terms of absolute molecular mass sensing (theoretical sensitivity of 1fg molecular mass) thanks to its extremely small dimensions. We use the avidin/biotin high affinity couple to demonstrate good repeatability and detection of protein concentrations down to 10ng/ml. Fabrication with Deep UV lithography allows for cheap mass production and integration with electronic functions for complete lab-on-chip devices.

Subfields: Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/8af67c8688fe36b39c34e5845b50cf4bdbd0cc56

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Citations in the corpus

Silicon-on-Insulator Spectral Filters Fabricated With CMOS Technology (2010, methodology): “This is essential for wavelength division multiplexing (WDM) communications, but it can find also important applications in sensing [ 8 ]–[10] or spectroscopy.”
Computational Study of Photonic Crystals Nano-Ring Resonator for Biochemical Sensing (2010, positive): “De Vos et al. have reported detection ofproteinconcentrationdownto10ng/mlbasedonamicro-ring resonator of 10 10 size, while the concept of packaging this micro-ring resonator inside a microfluidic channel has been revealed as well [ 8 ].”
Silicon Nitride in Silicon Photonics (2018, background): “Photonic-integrated circuits (PICs) are poised to enable an increasing number of applications including data communications and telecommunications [1], [2], biosensing [3], positioning and navigation [4], low noise microwave synthesizers [5], spectroscopy [6], radio-frequency (RF) signal processing ”
Silicon Photonic Biosensors Using Label-Free Detection (2018, background): “Although 151 resonator-based biosensors enable dense on-chip integration and offer a similar DL of 10−5 ∼ 10−7 RIU 152 [18,72], their Q-factors (except toroid resonators) are relatively low especially with water cladding (around 153 104) due to the high optical loss, such as side-wall scattering, be”
Design guidelines for optical resonator biochemical sensors (2009, background): “2 Recently there has been an increasing interest in employing dielectric optical micro-resonators (resonant/optical cavities) as miniaturized biochemical sensors, and such a sensing mechanism has been demonstrated using a number of resonator devices including micro-spheres [1], microrings [2-4], mic”