Diamond and diamond-like carbon MEMS

By J. K. Luo, Y. Q. Fu, H. R. Le, J. Williams, S. Spearing, W. I. Milne. 2007

210 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/89e4e20737e25ae6d7cd253d74f8ad922c8d7999