Large ferroelectric polarization of TiN/Hf0.5Zr0.5O2/TiN capacitors due to stress-induced crystallization at low thermal budget

By S. Kim, D. Narayan, Jae-Gil Lee, Jaidah Mohan, Joy S. Lee, Jaebeom Lee, H. S. Kim, Young-Chul Byun, A. Lucero, C. Young and 4 more. 2017

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