Ultrathin single-crystalline-silicon cantilever resonators: Fabrication technology and significant specimen size effect on Young’s modulus

By Xinxin Li, Takahito Ono, Yuelin Wang, Masayoshi Esashi. 2003

359 citations recorded by the source corpus.

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

Size and temperature effects on the fracture mechanisms of silicon nanowires: Molecular dynamics simulations (2010, background): “A similar softening behavior of Young’s modulus is observed in the experiments, but the size effect is much more pronounced (Li et al., 2003; Zhu et al., 2009).”
Surface stress effects on the resonant properties of metal nanowires: The importance of finite deformation kinematics and the impact of the residual surface stress (2008, methodology): “[ The fixed/fixed boundary conditions utilized in this work represent nanowires that are fabricated through a top-down process of etching or lifting-off of a metal film on a semiconducting substrate [76–78] as is commonly done in experimental studies of NEMS-based nanowire resonance.”
A size-dependent four variable refined plate model for functionally graded microplates based on modified couple stress theory (2015, background): “In such applications, size effects have been experimentally observed [5–8] and should also play vital roles in potential applications of FG micro/nano beams and plates.”
Thermo-mechanical behavior of low-dimensional systems: The local bond average approach (2009, background): “The modulus of Cr [70] and Si [71] nanocantilevers is also measured to decrease sharply with decreasing diameter.”