Planar Superconducting Resonators with Internal Quality Factors above One Million

By A. Megrant, C. Neill, R. Barends, B. Chiaro, Yu Chen, L. Feigl, J. Kelly, E. Lucero, M. Mariantoni, P. O’Malley and 9 more. 2012

456 citations recorded by the source corpus.

We describe the fabrication and measurement of microwave coplanar waveguide resonators with internal quality factors above 10 million at high microwave powers and over 1 million at low powers, with the best low power results approaching 2 million, corresponding to ~1 photon in the resonator. These quality factors are achieved by controllably producing very smooth and clean interfaces between the resonators' aluminum metallization and the underlying single crystal sapphire substrate. Additionally, we describe a method for analyzing the resonator microwave response, with which we can directly determine the internal quality factor and frequency of a resonator embedded in an imperfect measurement circuit.

Subfields: Astronomy and Astrophysics, Atomic and Molecular Physics, and Optics, Condensed Matter Physics

View Paper: https://www.semanticscholar.org/paper/86e0a74159cbee583134658803b8a3c8e7a2a0fd

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In Astronomy and Astrophysics

In Atomic and Molecular Physics, and Optics

In Condensed Matter Physics

Citations in the corpus

Observation of separated dynamics of charge and spin in the Fermi-Hubbard model (2020, background): “Temporal instabilities, including drifts and fluctuations in the control fields and qubit frequencies [51–58], can propagate and accumulate coherently in large quantum circuits.”
Circuit quantum electrodynamics (2020, unknown): “Internal quality factors over 106 can be achieved by careful fabrication minimizing the occurrence of TLSs and by etching techniques to avoid substrate-vacuum interfaces in regions of high electric fields (Bruno et al., 2015; Calusine et al., 2018; Megrant et al., 2012; Vissers et al., 2010).”
Quantum information processing and quantum optics with circuit quantum electrodynamics (2020, background): “Importantly, the lifetime of single microwave photons in these structures can be long, approaching 0.1 ms in coplanar resonators 13–16 and 1 ms in 3D cavities of the type illustrated in Fig.”
Superconducting quantum circuits at the surface code threshold for fault tolerance (2014, unknown): “The qubit capacitor, ground plane, readout resonators, and control wiring are made using molecular beam epitaxy (MBE)-grown Al on sapphire [3].”
Microwave photonics with superconducting quantum circuits (2017, background): “The internal quality factors of CPW resonators can reach values above 10(6) [121].”