Maskless lithography

By R. F. Pease. 2005

145 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Electrical and Electronic Engineering, Surfaces, Coatings and Films

View Paper: https://www.semanticscholar.org/paper/8650485396ce3db3a5abfececf400fa26c664921

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Biomedical Engineering

1. Werayut Srituravanich
2. Alongkorn Pimpin
3. Khadijah A Altammar

In Electrical and Electronic Engineering

1. Werayut Srituravanich
2. Alongkorn Pimpin

In Surfaces, Coatings and Films

1. Werayut Srituravanich
2. Alongkorn Pimpin

Citations in the corpus

• Review on Micro- and Nanolithography Techniques and Their Applications (2012, background): “[1-10], soft lithography [11-13], and nanoimprint lithography [14-21].”