Micro/nanotribological characterization of PDMS and PMMA used for BioMEMS/NEMS applications

By N. Tambe, Bharat Bhushan. 2005

87 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Mechanics of Materials

View Paper: https://www.semanticscholar.org/paper/85c9faaea4bead1f24eed0ff21c5f1a05e88a803

Citations in the corpus

• Stability of the hydrophilic behavior of oxygen plasma activated SU-8 (2007, unknown): “Introduction Bio micro-electro-mechanical systems (bio-MEMS) and microfluidic devices are usually built up from chemically inert materials such as silicon, glass, poly-dimethyl-siloxane (PDMS), polymethyl-methacrylate (PMMA), or SU-8 [1-8].”